I-Trimethylaluminum (TMAI)
I-Trimethylalumane (TMAI)
| Amagama afanayo | I-Trimethylaluminum, i-Aluminium Trimethyl, i-Aluminium Trimethanide, i-TMA, i-TMAL, i-AlMe3, i-Ziegler-Natta Catalyst, i-Trimethyl-, i-Trimethylalane. |
| Inombolo Ye-Cas | 75-24-1 |
| Ifomula yamakhemikhali | C6H18Al2 |
| Isisindo se-molar | 144.17 g/mol, 72.09 g/mol (C3H9Al) |
| Ukubukeka | Uketshezi olungenambala |
| Ubuningi | 0.752 g/cm3 |
| Indawo yokuncibilika | 15℃ (59 ℉; 288K) |
| Indawo yokubilisa | 125--130℃ (257--266 ℉, 398--403K) |
| Ukuncibilika emanzini | Ukusabela |
| Umfutho womusi | 1.2 kPa (20℃), 9.24 kPa (60℃) |
| Ukuthamba | 1.12 cP (20℃), 0.9 cP (30℃) |
I-Trimethylaluminum (TMal), njengomthombo we-metal-organic (MO), isetshenziswa kabanzi embonini ye-semiconductor futhi isebenza njengesandulela esiyinhloko sokufakwa kwe-atomic layer (ALD), ukufakwa kwe-chemical vapor (CVD), kanye nokufakwa kwe-metal-organic chemical vapor (MOCVD). Isetshenziselwa ukulungiselela amafilimu aqukethe i-aluminium ehlanzekile kakhulu, njenge-aluminium oxide kanye ne-aluminium nitride. Ngaphezu kwalokho, i-TMal ithola ukusetshenziswa okubanzi njenge-catalyst kanye ne-ejenti yayo esekelayo ekuhlanganisweni kwezinto eziphilayo kanye nokusabela kwe-polymerization.
I-Trimethylaluminum (TMAI) isebenza njengesandulela sokufakwa kwe-aluminium oxide futhi isebenza njenge-catalyst ye-Ziegler-Natta. Futhi iyisandulela se-aluminium esisetshenziswa kakhulu ekukhiqizweni kwe-epitaxy yesigaba somoya wensimbi-organic (MOVPE). Ngaphezu kwalokho, i-TMAI isebenza njenge-ejenti ye-methylation futhi ivame ukukhishwa kumarokhethi anomsindo njenge-tracer yokufunda amaphethini omoya womoya ongaphezulu.
Ukucaciswa kwebhizinisi okungu-99.9999% Trimethylaluminium - I-silicon ephansi kanye nokuqukethwe okuphansi komoya-mpilo (6N TAMI-Low Si kanye ne-Low Ox)
| Isici | Umphumela | Imininingwane | Isici | Umphumela | Imininingwane | Isici | Umphumela | Imininingwane |
| Ag | ND | <0.03 | Cr | ND | <0.02 | S | ND | <0.05 |
| As | ND | <0.03 | Cu | ND | <0.02 | Sb | ND | <0.05 |
| Au | ND | <0.02 | Fe | ND | <0.04 | Si | ND | ≤0.003 |
| B | ND | <0.03 | Ge | ND | <0.05 | Sn | ND | <0.05 |
| Ba | ND | <0.02 | Hg | ND | <0.03 | Sr | ND | <0.03 |
| Be | ND | <0.02 | La | ND | <0.02 | Ti | ND | <0.05 |
| Bi | ND | <0.03 | Mg | ND | <0.02 | V | ND | <0.03 |
| Ca | ND | <0.03 | Mn | ND | <0.03 | Zn | ND | <0.05 |
| Cd | ND | <0.02 | Ni | ND | <0.03 | |||
| Co | ND | <0.02 | Pb | ND | <0.03 |
Qaphela:
Ngaphezu kwakho konke, inani le-PPM ngesisindo sensimbi, futhi i-ND = ayitholakalanga
Indlela Yokuhlaziya: ICP-OES/ICP-MS
Imiphumela ye-FT-NMR (i-LOD yokungcola kwe-FT-NMR okungokwemvelo nokunomoya-mpilo ingu-0.1ppm):
Isiqinisekiso se-oksijini <0.2 ppm (Silinganiswa ku-FT-NMR)
1. Akukho ukungcola okungokwemvelo okutholiwe
2. Akukho ukungcola okunomoya-mpilo okutholiwe
Isetshenziselwani i-Trimethylaluminum (TMAI)?
I-Trimethylaluminum (TMA)- Izicelo kanye Nokusetshenziswa
I-Trimethylaluminum (TMA) iyinhlanganisela ye-organoaluminum emsulwa kakhulu esebenza njengesandulela esibalulekile kweminye yemikhakha yokukhiqiza ethuthuke kakhulu. Ukusebenza kwayo okumangalisayo kanye nomfutho womusi kwenza kube yinto ekhethwayo yokufaka amafilimu anembile aqukethe i-aluminium kubuchwepheshe be-elekthronikhi namandla, kanye nengxenye eyisisekelo ekukhiqizweni kwe-polyolefin.
I-TMA yethu yenziwe ngezindinganiso zobumsulwa eziqinile kakhulu, ngokulawula okuqinile ukungcola kwezinto eziyisisekelo, okunomoya-mpilo, kanye nezinto eziphilayo ukuqinisekisa ukusebenza kahle kwezicelo zakho ezidinga kakhulu.
Izicelo Eziyinhloko kanye Nezimboni:
1. Ukwakhiwa kwe-semiconductor kanye ne-Microelectronics
Embonini ye-semiconductor, i-TMA ibalulekile ekubekeni amafilimu amancane ngokunemba kwesilinganiso se-athomu.
* Ama-High-k Dielectrics: Asetshenziswa ku-Atomic Layer Deposition (ALD) kanye ne-Chemical Vapor Deposition (CVD) ukuze kukhuliswe amafilimu amancane e-aluminium oxide (Al₂O₃) afanayo, angenamigoqo, asebenza njenge-high-k gate dielectrics kuma-transistors athuthukile namadivayisi ememori.
* Ama-Compound Semiconductors: Umthombo we-aluminium okhethwayo ku-Metalorganic Vapor Phase Epitaxy (MOVPE) wokukhulisa ama-compound semiconductors asebenza kahle kakhulu e-III-V. Lezi zinto zibalulekile ku:
* Ama-elekthronikhi Avame Kakhulu: (isb., Ama-AlGaA, i-AlInGaP)
* Ama-Optoelectronics: (isb., i-AlGaN, i-AlInGaN)
2. Amandla Ahlanzekile kanye ne-Photovoltaics
I-TMA inika amandla okusebenza kahle nokuqina okuphezulu kubuchwepheshe bamandla elanga.
* Izingqimba Zokudlulisa Okungaphezulu: Ezifakwa nge-ALD noma i-Plasma-Enhanced CVD (PECVD), amafilimu e-aluminium oxide (Al₂O₃) avela ku-TMA ahlinzeka ngokudlulisa okungaphezulu okuvelele kwamaseli elanga e-silicon acwebezelayo. Lokhu kunciphisa kakhulu ukuhlanganiswa kwe-charge carrier, okuholela ekuzuzeni okukhulu ekusebenzeni kahle kokuguqulwa kwamaseli kanye nokuzinza kwesikhathi eside.
3. Ukukhanyisa Okuthuthukisiwe Nokubonisa (i-LED)
Ukukhiqizwa kwama-LED akhanya kakhulu futhi asebenzisa amandla kahle kuncike ku-TMA emsulwa kakhulu.
* I-LED Epitaxy: Isebenza njengesandulela se-aluminium kuma-reactor e-MOVPE ukukhulisa izendlalelo ezisebenzayo (isb., i-AlGaN) ngama-LED aluhlaza okwesibhakabhaka, aluhlaza okotshani, kanye nama-ultraviolet.
* Ukudlulisa Idivayisi: Kusetshenziselwa ukufaka amafilimu e-aluminium oxide noma e-aluminium nitride avikelayo athuthukisa ukusebenza kahle kokukhipha ukukhanya futhi andise isikhathi sokusebenza kwamadivayisi e-LED.
4. Ukukhiqizwa Kwe-Industrial Catalysis kanye ne-Polymer
Ukubaluleka kwezimboni kwe-TMA kusekelwe endimeni yayo ekuqalisweni kwemisebenzi.
* I-Polyolefin Catalysis: Yiyona nto eyinhloko yokuqala ukwenziwa kwe-Methylaluminoxane (MAO), i-co-catalyst ebalulekile ezinhlelweni ze-Ziegler-Natta kanye ne-metallocene catalyst. Lezi zinhlelo zikhiqiza iningi elikhulu lamapulasitiki e-polyethylene kanye ne-polypropylene emhlabeni.
Izici Eziyinhloko Nezinzuzo:
* Ukuhlanzeka Okuphezulu Kakhulu: Kulawulwa ngokucophelela ukuze kuncishiswe ukungcola okonakele ukusebenza kwe-elekthronikhi kanye nomsebenzi wokuvuselela amandla.
* I-Superior Precursor: Inikeza ukuguquguquka okuhle kakhulu, ukuzinza kokushisa, kanye nezici zokubola ezihlanzekile zokufakwa kwefilimu esezingeni eliphezulu.
* Izinga Lemboni: Umthombo we-aluminium osunguliwe nothembekile wezinqubo ze-MOVPE, ALD, kanye ne-CVD kuzo zonke izikhungo zocwaningo nokuthuthukiswa komhlaba wonke kanye nezindawo zokukhiqiza.
* Isisekelo Sepulasitiki: Izinto zokusetshenziswa ezibalulekile ezivumela ukukhiqizwa kwama-polymer e-polyolefin aguquguqukayo futhi abalulekile.
Isixwayiso: I-Trimethylaluminium iyinto ethambile futhi ezwela umswakama edinga izindlela ezikhethekile zokuphatha nokuphepha. Ulwazi olunikeziwe luhloselwe izinjongo ezichazayo. Kungumsebenzi womsebenzisi ukuphatha le nto ngokuvumelana nazo zonke iziqondiso zokuphepha ezifanele kanye nokunquma ukuthi ifaneleka yini ukusetshenziswa okuthile.
