Trimethylaluminum (TMAI)
Trimethylalumine (TMAI)
| Okwu ndị yiri ya | Trimethylaluminum, Aluminom Trimethyl, Aluminom Trimethanide, TMA, TMAL, AlMe3, Ziegler-Natta Catalyst, Trimethyl-, Trimethylalane. |
| Nọmba Cas | 75-24-1 |
| Usoro kemịkalụ | C6H18Al2 |
| Oke mola | 144.17 g/mol, 72.09 g/mol (C3H9Al) |
| Ọdịdị | Mmiri mmiri na-enweghị agba |
| Njupụta | 0.752 g/cm3 |
| Ebe agbaze | 15℃ (59 ℉; 288K) |
| Ebe isi mmiri | 125--130℃ (257--266 ℉, 398--403K) |
| Mmiri na-agbaze | Mmeghachi omume |
| Nrụgide uzuoku | 1.2kPa (20 ℃), 9.24 kPa (60 ℃) |
| Viscositi | 1.12 cP (20 ℃), 0.9 cP (30 ℃) |
Trimethylaluminum (TMAl), dịka isi iyi metal-organic (MO), a na-ejikarị ya eme ihe n'ụlọ ọrụ semiconductor ma na-eje ozi dị ka ihe dị mkpa maka ntinye akwa atomic (ALD), ntinye vapor kemịkal (CVD), na ntinye vapor kemịkalụ metal-organic (MOCVD). A na-eji ya eme ihe iji kwadebe ihe nkiri nwere aluminom dị ọcha, dị ka aluminom oxide na aluminom nitride. Na mgbakwunye, TMMal na-achọta ọtụtụ ojiji dị ka ihe na-akpali akpali na ihe enyemaka ya na njikọ organic na mmeghachi omume polymerization.
Trimethylaluminum (TMAI) na-arụ ọrụ dị ka ihe na-ebute ụzọ maka itinye aluminum oxide ma na-arụ ọrụ dị ka ihe na-akpali Ziegler-Natta. Ọ bụkwa ihe na-ebute ụzọ aluminom a na-ejikarị eme ihe na mmepụta nke metal-organic vapor-phase epitaxy (MOVPE). Ọzọkwa, TMAI na-eje ozi dị ka ihe na-eme ka methylation dị, a na-ahapụkwa ya ugboro ugboro site na rọketi ndị na-ada ụda dị ka ihe na-egosi ihe maka ịmụ ụdị ikuku dị n'elu ikuku.
Nkọwapụta ụlọ ọrụ nke 99.9999% Trimethylaluminum - Silicon dị ala na obere oxygen dị (6N TAMI-Low Si na Low Ox)
| Ihe | Nsonaazụ | Nkọwapụta | Ihe | Nsonaazụ | Nkọwapụta | Ihe | Nsonaazụ | Nkọwapụta |
| Ag | ND | <0.03 | Cr | ND | <0.02 | S | ND | <0.05 |
| As | ND | <0.03 | Cu | ND | <0.02 | Sb | ND | <0.05 |
| Au | ND | <0.02 | Fe | ND | <0.04 | Si | ND | ≤0.003 |
| B | ND | <0.03 | Ge | ND | <0.05 | Sn | ND | <0.05 |
| Ba | ND | <0.02 | Hg | ND | <0.03 | Sr | ND | <0.03 |
| Be | ND | <0.02 | La | ND | <0.02 | Ti | ND | <0.05 |
| Bi | ND | <0.03 | Mg | ND | <0.02 | V | ND | <0.03 |
| Ca | ND | <0.03 | Mn | ND | <0.03 | Zn | ND | <0.05 |
| Cd | ND | <0.02 | Ni | ND | <0.03 | |||
| Co | ND | <0.02 | Pb | ND | <0.03 |
Rịba ama:
Karịa ihe niile, uru PPM site na ibu na ígwè, na ND = achọpụtaghị
Usoro Nyocha: ICP-OES/ICP-MS
Nsonaazụ FT-NMR (LOD maka FT-NMR ihe na-adịghị ọcha na ihe na-adịghị ọcha oxygen bụ 0.1ppm):
Nkwa oxygen <0.2 ppm (A tụrụ ya na FT-NMR)
1.Achọpụtaghị ihe na-adịghị ọcha nke ihe ndị dị ndụ
2.Achọpụtaghị ihe ndị na-adịghị mma e ji oxygen mee
Gịnị ka e ji Trimethylaluminum (TMAI) eme?
Trimethylaluminum (TMA)- Ngwa na Ojiji
Trimethylaluminum (TMA) bụ ihe mejupụtara organoaluminum dị oke ọcha nke na-eje ozi dị ka ihe dị mkpa n'ụfọdụ ngalaba mmepụta kachasị elu. Mmeghachi omume ya pụrụ iche na nrụgide uzuoku na-eme ka ọ bụrụ ihe a họọrọ maka itinye ihe nkiri nwere aluminom kpọmkwem na teknụzụ eletrọniki na ike, yana ihe ndabere na mmepụta polyolefin.
A na-emepụta TMA anyị ka ọ dị n'ụkpụrụ ịdị ọcha kachasị sie ike, yana njikwa siri ike na ihe ndị na-adịghị ọcha nke ihe dị n'ime, nke jupụtara na oxygen, na nke organic iji hụ na arụmọrụ kachasị mma na ngwa gị kachasị achọ.
Ngwa na Ụlọ Ọrụ Ndị Isi:
1. Mmepụta Semiconductor na Microelectronics
N'ime ụlọ ọrụ semiconductor, TMA dị oke mkpa maka itinye ihe nkiri dị gịrịgịrị na nhazi atọm.
* Dielectrics dị elu-k: A na-eji ya eme ihe na Atomic Layer Deposition (ALD) na Chemical Vapor Deposition (CVD) iji mepụta ihe nkiri dị gịrịgịrị nke aluminum oxide (Al₂O₃), nke na-eje ozi dị ka high-k gate dielectrics na transistors dị elu na ngwaọrụ ebe nchekwa.
* Semiconductors compound: Isi iyi aluminom kachasị mma na Metalorganic Vapor Phase Epitaxy (MOVPE) maka itolite semiconductors compound III-V dị elu. Ihe ndị a dị mkpa maka:
* Igwe eletrọniki dị elu: (dịka ọmụmaatụ, AlGaAs, AlInGaP)
* Optoelectronics: (dịka ọmụmaatụ, AlGaN, AlInGaN)
2. Ike Dị Ọcha na Fotovoltaics
TMA na-eme ka arụmọrụ na ịdịte aka dị elu na teknụzụ ike anyanwụ.
* Akwa mkpuchi elu: E tinyere ya site na ALD ma ọ bụ Plasma-Enhanced CVD (PECVD), ihe nkiri aluminum oxide (Al₂O₃) sitere na TMA na-enye passivation elu pụrụ iche maka mkpụrụ ndụ anyanwụ silicon kristal. Nke a na-ebelata njikọta nke ndị na-ebu chaja nke ukwuu, na-eduga na nnukwu uru na arụmọrụ ntụgharị sel na nkwụsi ike ogologo oge.
3. Ọkụ na Ngosipụta Dị Elu (LED)
Mmepụta nke LED ndị na-enwu gbaa nke ọma ma na-arụ ọrụ nke ọma na-adabere na TMA dị ọcha nke ukwuu.
* LED Epitaxy: Na-eje ozi dị ka ihe na-ebute aluminom na MOVPE reactors iji too oyi akwa ndị na-arụ ọrụ (dịka ọmụmaatụ, AlGaN) na LEDs na-acha anụnụ anụnụ, akwụkwọ ndụ akwụkwọ ndụ, na ultraviolet.
* Njikwa Ngwaọrụ: A na-eji ya echekwa ihe nkiri nchebe nke aluminom oxide ma ọ bụ aluminom nitride nke na-eme ka arụmọrụ mwepụta anya dịkwuo mma ma na-agbatị ndụ ọrụ nke ngwaọrụ LED.
4. Mmepụta Mmepụta Ụlọ Ọrụ na Mmepụta Polymer
Mkpa TMA dị n'ọrụ mmepụta ihe sitere n'ọrụ ya na nhazi ihe ọkụkụ.
* Polyolefin Catalysis: Ọ bụ ihe mmalite mbụ maka mmepụta nke Methylaluminoxane (MAO), ihe dị mkpa na-akpali akpali na sistemụ Ziegler-Natta na metallocene catalyst. Sistemụ ndị a na-emepụta ọtụtụ plastik polyethylene na polypropylene n'ụwa.
Njirimara na Uru Ndị Dị Mkpa:
* Ịdị Ọcha Dị Elu nke Ukwuu: A na-achịkwa ya nke ọma iji belata ihe ndị na-adịghị mma nke na-emebi arụmọrụ eletrọniki na ọrụ katalytic.
* Ihe Nlereanya Kachasị Elu: Na-enye nnukwu mgbanwe, nkwụsi ike okpomọkụ, na njirimara ire ere dị ọcha maka itinye ihe nkiri dị elu.
* Ụkpụrụ Ụlọ Ọrụ: Isi iyi aluminom e guzobere eguzobe, nke a pụrụ ịtụkwasị obi maka usoro MOVPE, ALD, na CVD n'ofe ụlọ ọrụ nyocha na mmepụta zuru ụwa ọnụ.
* Ntọala maka Plastik: Ihe dị mkpa e ji emepụta polima polyolefin dị iche iche ma dị mkpa.
Nkọwapụta: Trimethylaluminum bụ ihe e ji pyrophoric na mmiri mee nke chọrọ usoro njikwa pụrụ iche na nchekwa. Ozi enyere bụ maka ebumnuche nkọwa. Ọ bụ ọrụ onye ọrụ ijikwa ihe a dịka ntuziaka nchekwa niile dị mkpa si dị ma chọpụta ma ọ dabara adaba maka ngwa akọwapụtara.
