Intuthuko esheshayo emikhakheni yolwazi kanye ne-optoelectronics ikhuthaze ukuvuselelwa okuqhubekayo kobuchwepheshe bokupholisha ngomshini wamakhemikhali (i-CMP). Ngaphezu kwemishini nezinto zokwakha, ukutholwa kwezindawo ezinembe kakhulu kuncike kakhulu ekwakhiweni nasekukhiqizweni kwezimboni kwezinhlayiya ezihuzukayo ezisebenza kahle kakhulu, kanye nokulungiswa kwe-slurry yokupholisha ehambisanayo. Futhi ngokuthuthuka okuqhubekayo kokunemba kokucubungula ubuso kanye nezidingo zokusebenza kahle, izidingo zezinto zokupholisha ezisebenza kahle kakhulu nazo ziya ngokuya ziphakama. I-Cerium dioxide isetshenziswe kabanzi ekushicileleni ngokunemba kobuso kwamadivayisi e-microelectronic kanye nezingxenye ze-optical ezisebenza kahle kakhulu.
Impuphu yokupholisha ye-Cerium oxide polishing powder (VK-Ce01) inezinzuzo zekhono lokusika eliqinile, ukusebenza kahle kokupholisha okuphezulu, ukunemba okuphezulu kokupholisha, ikhwalithi enhle yokupholisha, indawo yokusebenza ehlanzekile, ukungcola okuphansi, impilo yesevisi ende, njll., futhi isetshenziswa kabanzi ekupholiseni ngokunemba kwe-optical kanye nensimu ye-CMP, njll. ithatha isikhundla esibaluleke kakhulu.
Izakhiwo eziyisisekelo ze-cerium oxide:
I-Ceria, eyaziwa nangokuthi i-cerium oxide, iyi-oxide ye-cerium. Ngalesi sikhathi, i-valence ye-cerium ingu-+4, kanti ifomula yamakhemikhali yi-CeO2. Umkhiqizo omsulwa uyimpuphu emhlophe esindayo noma i-cubic crystal, kanti umkhiqizo ongcolile uphuzi okhanyayo noma ngisho nempuphu epinki kuya kobomvu onsundu (ngoba iqukethe amanani amancane e-lanthanum, i-praseodymium, njll.). Emazingeni okushisa egumbi kanye nengcindezi, i-ceria iyi-oxide eqinile ye-cerium. I-Cerium ingakha futhi i-+3 valence Ce2O3, engazinzile futhi izokwakha i-CeO2 eqinile ne-O2. I-Cerium oxide incibilika kancane emanzini, kuma-alkali kanye nase-asidi. Ubuningi bungu-7.132 g/cm3, iphuzu lokuncibilika lingu-2600℃, kanti iphuzu lokubila lingu-3500℃.
Indlela yokupholisha ye-cerium oxide
Ubulukhuni bezinhlayiya ze-CeO2 abuphezulu. Njengoba kuboniswe etafuleni elingezansi, ubulukhuni be-cerium oxide buphansi kakhulu kunobe-diamond ne-aluminium oxide, futhi buphansi kunobe-zirconium oxide ne-silicon oxide, okulingana ne-ferric oxide. Ngakho-ke akunakwenzeka ngobuchwepheshe ukuxosha izinto ezisekelwe ku-silicon oxide, njengengilazi ye-silicate, ingilazi ye-quartz, njll., nge-ceria enobulukhuni obuphansi ngokombono wemishini kuphela. Kodwa-ke, i-cerium oxide okwamanje iyimpuphu yokupholisha ekhethwayo yokupholisha izinto ezisekelwe ku-silicon oxide noma ngisho nezinto ze-silicon nitride. Kungabonakala ukuthi ukupholisha kwe-cerium oxide nakho kuneminye imiphumela ngaphandle kwemiphumela yemishini. Ubulukhuni bedayimane, okuyinto evame ukusetshenziswa yokugaya nokupholisha, ngokuvamile inezikhala ze-oxygen ku-lattice ye-CeO2, eshintsha izakhiwo zayo zomzimba nezamakhemikhali futhi inomthelela othile ezimpahleni zokupholisha. Izimpuphu zokupholisha ze-cerium oxide ezisetshenziswa njalo ziqukethe inani elithile lamanye ama-oxide angavamile. I-Praseodymium oxide (Pr6O11) nayo inesakhiwo se-cubic lattice esigxile ebusweni, esifanelekela ukupholisha, kuyilapho amanye ama-lanthanide rare earth oxides engenalo ikhono lokupholisha. Ngaphandle kokushintsha isakhiwo sekristalu se-CeO2, ingakha isisombululo esiqinile ngayo ngaphakathi kobubanzi obuthile. Ukuze uthole i-nano-cerium oxide polishing powder (VK-Ce01) ehlanzekile kakhulu, lapho i-cerium oxide (VK-Ce01) ihlanzekile kakhulu, ikhono lokupholisha likhula futhi isikhathi eside, ikakhulukazi kumalensi e-optical engilazi eqinile ne-quartz isikhathi eside. Lapho kupholisha nge-cyclic, kuyalulekwa ukusebenzisa i-cerium oxide polishing powder (VK-Ce01) ehlanzekile kakhulu.
Ukusetshenziswa kwempuphu yokupholisha i-cerium oxide:
Impuphu yokupholisha i-Cerium oxide (VK-Ce01), esetshenziswa kakhulu ekupholiseni imikhiqizo yengilazi, isetshenziswa kakhulu kulezi zinsimu ezilandelayo:
1. Izibuko, ukupholisha ilensi yengilazi;
2. Ilensi yokubona, ingilazi yokubona, ilensi, njll.;
3. Ingilazi yesikrini sefoni ephathekayo, indawo yewashi (umnyango wewashi), njll.;
4. Isibuko se-LCD zonke izinhlobo zesikrini se-LCD;
5. Amatshe anombala oluhlaza okwesibhakabhaka, amadayimane ashisayo (amakhadi, amadayimane kumajini), amabhola okukhanyisa (ama-chandelier asezingeni eliphezulu ehholo elikhulu);
6. Imisebenzi yezandla yekristalu;
7. Ukupholisha ingxenye yejade
Izinto ezisetshenziswayo zokupholisha i-cerium oxide zamanje:
Ubuso be-cerium oxide bufakwe i-aluminium ukuze kuthuthukiswe kakhulu ukupholishwa kwayo kwengilazi yokukhanya.
UMnyango Wezocwaningo Nokuthuthukiswa Kwezobuchwepheshe we-UrbanMines Tech. Limited, uphakamise ukuthi ukuhlanganiswa kanye nokuguqulwa kobuso bezinhlayiya zokupholisha yizindlela eziyinhloko nezindlela zokuthuthukisa ukusebenza kahle kanye nokunemba kokupholisha kwe-CMP. Ngoba izakhiwo zezinhlayiya zingalungiswa ngokuhlanganiswa kwezinto eziningi, kanye nokuqina kokuhlakazeka kanye nokusebenza kahle kokupholisha kwe-slurry yokupholisha kungathuthukiswa ngokuguqulwa kobuso. Ukulungiswa kanye nokusebenza kokupholisha kwempuphu ye-CeO2 efakwe i-TiO2 kungathuthukisa ukusebenza kahle kokupholisha ngaphezu kuka-50%, futhi ngesikhathi esifanayo, amaphutha obuso nawo ancishiswa ngo-80%. Umphumela wokupholisha ohambisanayo we-CeO2 ZrO2 kanye ne-SiO2 2CeO2 composite oxides; ngakho-ke, ubuchwepheshe bokulungiselela ama-doped ceria micro-nano composite oxides kubaluleke kakhulu ekuthuthukisweni kwezinto ezintsha zokupholisha kanye nengxoxo yendlela yokupholisha. Ngaphezu kwenani lokupholisha, isimo kanye nokusatshalaliswa kwe-dopant ezinhlayiyeni ezenziwe nakho kuthinta kakhulu izakhiwo zazo zobuso kanye nokusebenza kokupholisha.
Phakathi kwazo, ukwenziwa kwezinhlayiya zokupholisha ngesakhiwo sokumboza kukhanga kakhulu. Ngakho-ke, ukukhethwa kwezindlela nezimo zokwenziwa nakho kubaluleke kakhulu, ikakhulukazi lezo zindlela ezilula futhi ezingabizi kakhulu. Kusetshenziswa i-hydrated cerium carbonate njengezinto eziyinhloko zokusetshenziswa, izinhlayiya zokupholisha ze-cerium oxide ezenziwe nge-aluminium zakhiwe ngendlela ye-wet solid-phase mechanochemical. Ngaphansi kwesenzo samandla omshini, izinhlayiya ezinkulu ze-hydrated cerium carbonate zingahlukaniswa zibe izinhlayiya ezincane, kuyilapho i-aluminium nitrate isabela namanzi e-ammonia ukuze yakhe izinhlayiya ze-colloidal ezi-amorphous. Izinhlayiya ze-colloidal zinamathela kalula ezinhlayiyeni ze-cerium carbonate, futhi ngemva kokomiswa kanye ne-calcination, i-aluminium doping ingatholakala ebusweni be-cerium oxide. Le ndlela yasetshenziselwa ukwenziwa kwezinhlayiya ze-cerium oxide ezinamanani ahlukene e-aluminium doping, futhi ukusebenza kwazo kwe-polishing kwabonakala. Ngemva kokuba inani elifanele le-aluminium lingeziwe ebusweni bezinhlayiya ze-cerium oxide, inani elibi lamandla obuso lalizokhula, okwenza igebe phakathi kwezinhlayiya ezipholisha. Kukhona ukuxoshwa okunamandla kwe-electrostatic, okukhuthaza ukuthuthukiswa kokuqina kokumiswa okupholisha. Ngesikhathi esifanayo, ukumuncwa okuhlangene phakathi kwezinhlayiya ezihuzukayo kanye nesendlalelo esithambile esishajelwe kahle ngokusebenzisa ukukhanga kwe-Coulomb nakho kuzoqiniswa, okuzuzisa ukuxhumana okuhlangene phakathi kwesendlalelo esihuzukayo kanye nesendlalelo esithambile ebusweni bengilazi epholishiwe, futhi kukhuthaza ukuthuthukiswa kwesilinganiso sokupholishwa.