Nā te tere o te whanaketanga o ngā mara o te mōhiohio me te hikohiko opto kua whakatairanga i te whakahou tonu o te hangarau whakakanapa matū miihini (CMP). Haunga ngā taputapu me ngā rauemi, ko te whiwhinga o ngā mata tino tika e whakawhirinaki ana ki te hoahoa me te whakaputa ahumahi o ngā matūriki whakakanapa tino pai, me te whakarite i te para whakakanapa e rite ana. Ā, me te whakapai tonu i ngā whakaritenga mō te tika me te whai hua o te tukatuka mata, kei te piki haere hoki ngā whakaritenga mō ngā rauemi whakakanapa tino pai. Kua whakamahia whānuitia te hauhā cerium i roto i te miihini mata tika o ngā taputapu hiko iti me ngā wāhanga whatu tino tika.
He pai ngā painga o te paura whakakanapa cerium oxide (VK-Ce01) arā, he kaha te tapahi, he pai te whakakanapa, he tika te whakakanapa, he pai te kounga o te whakakanapa, he ma te taiao mahi, he iti te parahanga, he roa te ora mahi, ā, he whānuitia te whakamahinga i roto i te whakakanapa tika whatu me te CMP, me ērā atu. He tino hira te tūranga o te mara.
Ngā āhuatanga taketake o te waikura cerium:
Ko te Ceria, e mōhiotia ana ko te cerium oxide, he waikura o te cerium. I tēnei wā, ko te valence o te cerium he +4, ā, ko te tātai matū ko te CeO2. Ko te hua parakore he paura mātotoru, he tioata poraka rānei, ā, ko te hua poke he kowhai mārama, he paura māwhero rānei ki te parauri whero (nā te mea he iti noa te nui o te lanthanum, te praseodymium, me ētahi atu). I te pāmahana rūma me te pēhanga, he waikura pumau te ceria o te cerium. Ka taea hoki e te Cerium te hanga +3 valence Ce2O3, he mea kore pumau, ā, ka hanga CeO2 pumau me te O2. He paku wairewa te waikura cerium ki te wai, ki te kawakore me te waikawa. Ko te kiato he 7.132 g/cm3, ko te ira rewa he 2600℃, ā, ko te ira kohua he 3500℃.
Te tikanga whakakanapa o te cerium oxide
Kāore i te teitei te pakeke o ngā matūriki CeO2. E ai ki te ripanga i raro nei, he iti iho te pakeke o te waikura cerium i te taimana me te waikura konumohe, ā, he iti iho anō hoki i te waikura zirconium me te waikura silicon, he rite ki te waikura ferric. Nō reira, kāore e taea te tango i ngā rauemi e hangai ana ki te waikura silicon, pērā i te karāhe silicate, te karāhe quartz, me ētahi atu, me te ceria he iti te pakeke mai i te tirohanga miihini anake. Heoi, ko te waikura cerium te paura whakakanapa pai rawa atu mō te whakakanapa i ngā rauemi e hangai ana ki te waikura silicon, tae atu ki ngā rauemi silicon nitride. Ka kitea he pānga anō hoki o te whakakanapa waikura cerium i tua atu i ngā pānga miihini. Ko te pakeke o te taimana, he rauemi huri me te whakakanapa e whakamahia whānuitia ana, he maha ngā wāhi kore hāora i roto i te whatunga CeO2, e whakarerekē ana i ōna āhuatanga ā-tinana me te matū, ā, he pānga anō hoki ki ngā āhuatanga whakakanapa. Kei roto i ngā paura whakakanapa waikura cerium e whakamahia whānuitia ana he nui o ētahi atu waikura whenua onge. He hanganga whatu pūtoru kei waenganui o te waikura Praseodymium (Pr6O11), he mea pai mō te whakakanapa, engari kāore he kaha whakakanapa o ētahi atu waikura whenua onge lanthanide. Ki te kore e whakarerekē i te hanganga tioata o CeO2, ka taea e ia te hanga i tētahi otinga totoka me ia i roto i tētahi whānuitanga. Mō te paura whakakanapa waikura nano-cerium parakore teitei (VK-Ce01), ko te teitei ake o te parakore o te waikura cerium (VK-Ce01), ko te nui ake o te kaha whakakanapa me te roa ake o te ora mahi, inā koa mō ngā karaihe mārō me ngā karaihe whatu quartz mō te wā roa. I te wā e whakakanapa ana i te huringa, he mea tika kia whakamahia te paura whakakanapa waikura cerium parakore teitei (VK-Ce01).
Te whakamahinga o te paura whakakanapa cerium oxide:
Ko te paura whakakanapa cerium oxide (VK-Ce01), e whakamahia ana mō te whakakanapa i ngā hua karāhe, e whakamahia ana i ngā mara e whai ake nei:
1. Mōhiti, te whakakanapa i ngā arotahi karaihe;
2. Arotahi whatu, karāhe whatu, arotahi, me ētahi atu;
3. Karāhe mata waea pūkoro, te mata o te mātaaratanga (tatau mātaaratanga), me ētahi atu;
4. Mata LCD mō ngā momo mata LCD katoa;
5. Ngā rīpene kōhatu, ngā taimana wera (kāri, taimana i runga i ngā tarau tiini), ngā pōro rama (ngā rama whakapaipai i roto i te whare nui);
6. Ngā mahi toi karaihe;
7. Te whakakanapa wāhanga o te jade
Ko ngā hua whakakanapa cerium oxide o nāianei:
Kua pania te mata o te cerium oxide ki te konumohe hei whakapai ake i te oro o te karāhe whatu.
I whakaarohia e te Tari Rangahau me te Whakawhanake Hangarau o UrbanMines Tech. Limited, ko te whakakotahi me te whakarerekētanga mata o ngā matūriki whakakanapa ngā tikanga me ngā huarahi matua hei whakapai ake i te whai huatanga me te tika o te whakakanapa CMP. Nā te mea ka taea te whakatikatika i ngā āhuatanga matūriki mā te whakakotahi i ngā huānga maha-wāhanga, ā, ka taea te whakapai ake i te pumau o te horapa me te whai huatanga o te whakakanapa o te paru whakakanapa mā te whakarerekētanga mata. Ka taea e te mahi whakarite me te whakakanapa o te paura CeO2 kua whakaranua ki te TiO2 te whakapai ake i te whai huatanga o te whakakanapa mā te neke atu i te 50%, ā, i te wa ano, ka whakaitihia hoki ngā hapa mata mā te 80%. Ko te pānga whakakanapa tahi o ngā waikura hiato CeO2 ZrO2 me SiO2 2CeO2; nō reira, he mea nui te hangarau whakarite o ngā waikura hiato moroiti-nano ceria kua whakaranua mō te whakawhanaketanga o ngā rauemi whakakanapa hou me te matapaki i te tikanga whakakanapa. Haunga te nui o te whakakanapa, ko te āhua me te tohatoha o te tāpiri i roto i ngā matūriki kua whakahiatohia ka pā nui ki ō rātou āhuatanga mata me te mahi whakakanapa.
I roto i ēnei, he mea ātaahua ake te hanga o ngā matūriki whakakanapa me te hanganga whakakikorua. Nō reira, he mea tino nui hoki te whiriwhiri i ngā tikanga me ngā āhuatanga hanga, inā koa ko ngā tikanga he māmā, he iti hoki te utu. Mā te whakamahi i te waro cerium hydrated hei rauemi mata matua, i hangaia ngā matūriki whakakanapa cerium oxide kua pania ki te konumohe mā te tikanga matū matū-makuku. I raro i te mahi a te kaha miihini, ka taea te haehae i ngā matūriki nui o te waro cerium hydrated hei matūriki angiangi, i te wā e tauhohe ana te hauota konumohe ki te wai haukini hei hanga i ngā matūriki korōria kore-āhua. He ngāwari te piri o ngā matūriki korōria ki ngā matūriki waro cerium carbonate, ā, i muri i te whakamaroke me te whakapūkara, ka taea te whakatutuki i te paninga konumohe ki runga i te mata o te waro cerium. I whakamahia tēnei tikanga hei hanga i ngā matūriki waro cerium oxide me ngā rahinga rerekē o te paninga konumohe, ā, i tautuhia te mahi whakakanapa. I muri i te tāpiri i te nui o te konumohe ki te mata o ngā matūriki waro cerium oxide, ka piki ake te uara kino o te pūmanawa mata, ka hanga i te āputa i waenga i ngā matūriki whakakoi. He kaha ake te pana hiko, e whakatairanga ana i te whakapainga o te pumau o te whakatārewatanga whakakoi. I taua wā anō, ka kaha ake te mimiti tahi i waenga i ngā matūriki whakakoi me te paparanga ngohengohe kua utua pai mā te kukume a Coulomb, he mea whai hua tēnei ki te whakapā tahi i waenga i te paparanga whakakoi me te paparanga ngohengohe i runga i te mata o te karāhe kua orohia, ā, ka whakatairanga i te whakapainga o te tere oro.