Kufambira mberi nekukurumidza muminda yeruzivo ne optoelectronics kwakakurudzira kugadziridzwa kuri kuitwa tekinoroji ye chemical mechanical polishing (CMP). Kuwedzera pamichina nezvinhu, kuwanikwa kwenzvimbo dzakanyatsojeka kunoenderana nekugadzirwa uye kugadzirwa kwemaindasitiri kwezvikamu zvinoshandisa abrasive zvinobudirira, pamwe nekugadzirwa kwe slurry yekupukuta inoenderana. Uye nekuvandudzwa kuri kuitwa kwekururama kwekugadzirisa pamusoro uye zvinodiwa pakushanda zvakanaka, zvinodiwa zvezvinhu zvinoshandisa abrasive zvinobudirira zviri kuramba zvichikwira. Cerium dioxide yave ichishandiswa zvakanyanya mukugadzira michina ye microelectronic nezvikamu zve optical zvinonyatsojeka.
Upfu hwekupukuta hweCerium oxide (VK-Ce01) hune zvakanakira kugona kucheka kwakasimba, kushanda zvakanaka pakupukuta, kunyatsopukuta kwakanyanya, kunaka kwekupukuta kwakanaka, nzvimbo yakachena yekushanda, kusvibiswa kwakaderera, kugara kwenguva refu, nezvimwewo, uye hunoshandiswa zvakanyanya mukupukuta kwe optical neCMP, nezvimwewo.
Hunhu hwekutanga hwe cerium oxide:
Ceria, inozivikanwawo secerium oxide, ioxide yecerium. Panguva ino, valence yecerium iri +4, uye fomura yemakemikari iCeO2. Chigadzirwa chakachena ihupfu hwakanyanya kana cubic crystal, uye chigadzirwa chisina kuchena ihupfu hwakachenuruka kana kuti hwakatsvukuruka kusvika kutsvukuruka (nekuti ine huwandu hushoma hwelanthanum, praseodymium, nezvimwewo). Pakupisa kwemukamuri nekumanikidzwa, ceria ioxide yakagadzikana yecerium. Cerium inogonawo kuumba +3 valence Ce2O3, iyo isina kugadzikana uye inozogadzira CeO2 yakagadzikana neO2. Cerium oxide inonyungudika zvishoma mumvura, alkali uye acid. Kuwanda kwayo i7.132 g/cm3, nzvimbo yekunyunguduka i2600℃, uye nzvimbo yekufashaira i3500℃.
Maitiro ekupukuta ecerium oxide
Kuoma kweCeO2 particles hakuna kukwira. Sezvakaratidzwa mutafura iri pazasi, kuoma kwecerium oxide kwakaderera zvikuru pane kwedhaimani nealuminium oxide, uye kwakadererawo pane kwezirconium oxide nesilicon oxide, iyo yakaenzana neferric oxide. Saka hazvigoneki zvehunyanzvi kubvisa zvinhu zvakagadzirwa nesilicon oxide, zvakaita segirazi resilicate, girazi requartz, nezvimwewo, neceria ine kuoma kwakaderera kubva pamaonero emakanika chete. Zvisinei, cerium oxide parizvino ndiyo poda yekupukuta inodiwa pakupukuta zvinhu zvakagadzirwa nesilicon oxide kana kunyange zvinhu zvesilicon nitride. Zvinogona kuonekwa kuti cerium oxide polishing ine zvimwe zvinokanganisa kunze kwemhedzisiro yemakanika. Kuoma kwedhaimani, iyo inowanzoshandiswa kukuya nekupukuta, inowanzo kuve nemhepo isina chinhu muCeO2 lattice, iyo inochinja hunhu hwayo hwepanyama uye hwemakemikari uye ine simba rakati pahunhu hwekupukuta. Poda dzekupukuta dzecerium oxide dzinoshandiswa kazhinji dzine huwandu hwakati hwemamwe maokisijeni earth asingasviki. Praseodymium oxide (Pr6O11) inewo chimiro che cubic lattice chakatarisana nechiso, chakakodzera kupolisha, nepo mamwe ma lanthanide rare earth oxides asina kugona kupolisha. Pasina kuchinja chimiro che crystal cheCeO2, inogona kugadzira mhinduro yakasimba nayo mukati memhando yakati. Kune high-purity nano-cerium oxide polishing powder (VK-Ce01), kuchena kwe cerium oxide (VK-Ce01) kwakakwira, kugona kupolisha kwakawedzera uye hupenyu hwebasa hwakareba, kunyanya kune magirazi akaoma uye ma quartz optical lenses kwenguva yakareba. Pakupolisha kwe cyclic, zvinokurudzirwa kushandisa high-purity cerium oxide polishing powder (VK-Ce01).
Kushandisa upfu hwekupukuta hwecerium oxide:
Upfu hwekupukuta hweCerium oxide (VK-Ce01), hunonyanya kushandiswa pakupukuta zvigadzirwa zvegirazi, hunonyanya kushandiswa muminda inotevera:
1. Magirazi, kupukuta magirazi;
2. Lenzi yemaziso, girazi remaziso, lenzi, nezvimwewo;
3. Girazi refoni, nzvimbo yewachi (gonhi rewachi), nezvimwewo;
4. LCD monitor yemhando dzese dzeLCD screen;
5. Matombo eRhinestone, madhaimani anopisa (makadhi, madhaimani pajini), mabhora emwenje (machandelier eumbozha muhoro huru);
6. Mabasa emaoko ekristaro;
7. Kukwesha zvishoma kwejade
Zvinobva pakukwesha cerium oxide pari zvino:
Pamusoro pe cerium oxide pane aruminiyamu kuti iwedzere kupenya kwayo kwegirazi re optical.
Dhipatimendi reKutsvagisa neKuvandudza Tekinoroji reUrbanMines Tech. Limited, rakapa zano rekuti kusanganisa uye kugadzirisa pamusoro pezvikamu zvekupukuta ndiyo nzira huru uye nzira dzekuvandudza kushanda uye kururama kwekupukuta kweCMP. Nekuti hunhu hwezvikamu hunogona kugadziriswa nekubatanidza zvinhu zvakawanda, uye kugadzikana kwekupararira uye kushanda kwekupukuta kweslurry yekupukuta kunogona kuvandudzwa nekuchinja pamusoro. Kugadzirira uye kushanda kwekupukuta kweCeO2 powder doped neTiO2 kunogona kuvandudza kushanda kwekupukuta neinopfuura 50%, uye panguva imwe chete, zvikanganiso zvepaso zvinoderedzwawo ne80%. Kushanda pamwe chete kwekupukuta kweCeO2 ZrO2 neSiO2 2CeO2 composite oxides; saka, tekinoroji yekugadzirira yedoped ceria micro-nano composite oxides inokosha zvikuru pakugadzirwa kwezvinhu zvitsva zvekupukuta uye kukurukura nezvenzira yekupukuta. Kuwedzera kune huwandu hwedoping, mamiriro uye kugoverwa kwedopant muzvikamu zvakagadzirwa zvinokanganisawo zvakanyanya hunhu hwavo hwepaso uye kushanda kwekupukuta.
Pakati pazvo, kugadzirwa kwezvikamu zvekupukuta zvine chimiro chekufukidza kunokwezva zvikuru. Saka, kusarudzwa kwenzira dzekugadzira nemamiriro ezvinhu kwakakoshawo, kunyanya nzira dziri nyore uye dzinodhura zvishoma. Uchishandisa hydrated cerium carbonate sezvinhu zvikuru, zvikamu zvekupukuta zve cerium oxide zvakagadzirwa nearuminiyamu nenzira ye wet solid-phase mechanochemical. Pasi pesimba remuchina, zvikamu zvikuru zve hydrated cerium carbonate zvinogona kupatsanurwa kuita zvikamu zvitete, nepo aluminium nitrate ichisangana nemvura yeammonia kugadzira zvikamu zve colloidal zvisina kusimba. Zvikamu zve colloidal zvinonamirwa nyore nyore kune zvikamu zve cerium carbonate, uye mushure mekuomeswa uye kupiswa, aluminium doping inogona kuitwa pamusoro pe cerium oxide. Nzira iyi yakashandiswa kugadzira zvikamu zve cerium oxide zvine huwandu hwakasiyana hwe aluminium doping, uye mashandiro azvo ekupukuta akaonekwa. Mushure mekunge huwandu hwakakodzera hwe aluminium hwawedzerwa pamusoro pezvikamu zve cerium oxide, kukosha kwenzvimbo kwaizowedzera, izvo zvakaita kuti musiyano uripo pakati pezvikamu zvekurasa. Kune simba rakasimba re electrostatic repulsion, izvo zvinokurudzira kuvandudzwa kwekugadzikana kwekumisa kusimuka. Panguva imwe chete, kusanganiswa kwesimbi pakati pezvinhu zvinogumbura nesimbi yakapfava yakachajwa zvakanaka kuburikidza nekukwezva kweCoulomb kuchasimbiswawo, izvo zvinobatsira pakubatana kwesimbi nesimbi yakapfava pamusoro pegirazi rakapukutwa, uye zvinosimudzira kuvandudzwa kwehuwandu hwekupukutwa.