Uphuhliso olukhawulezileyo kwicandelo lolwazi kunye ne-optoelectronics lukhuthaze ukuhlaziywa okuqhubekayo kwetekhnoloji ye-chemical mechanical polishing (CMP). Ukongeza kwizixhobo kunye nezixhobo, ukufunyanwa kwemiphezulu echanekileyo kakhulu kuxhomekeke ngakumbi kuyilo kunye nemveliso yemizi-mveliso yamasuntswana abrasive asebenza kakuhle, kunye nokulungiswa kwe-slurry yokupolisha ehambelanayo. Kwaye ngokuphuculwa okuqhubekayo kokuchaneka kokucubungula umphezulu kunye neemfuno zokusebenza kakuhle, iimfuno zezixhobo zokupolisha ezisebenzayo kakhulu nazo ziya zisanda. I-Cerium dioxide isetyenziswa kakhulu ekuchwethezeni ngokuchanekileyo komphezulu wezixhobo ze-microelectronic kunye nezixhobo ze-optical ezichanekileyo.
I-Cerium oxide polishing powder (VK-Ce01) polishing powder ineengenelo zokuba namandla okusika aqinileyo, ukusebenza kakuhle kokupholisha, ukuchaneka okuphezulu kokupholisha, umgangatho olungileyo wokupholisha, indawo yokusebenza ecocekileyo, ungcoliseko oluphantsi, ubomi benkonzo ende, njl.njl., kwaye isetyenziswa kakhulu ekupholiseni ngokuchanekileyo kwe-optical kunye ne-CMP, njl.njl. ithatha indawo ebaluleke kakhulu.
Iipropati ezisisiseko ze-cerium oxide:
I-Ceria, ekwaziwa ngokuba yi-cerium oxide, yi-oxide ye-cerium. Ngeli xesha, i-valence ye-cerium yi-+4, kwaye ifomula yekhemikhali yi-CeO2. Imveliso ecocekileyo yi-white heavy powder okanye i-cubic crystal, kwaye imveliso engcolileyo inombala otyheli okanye opinki ukuya kubomvu-mdaka (kuba inemilinganiselo embalwa ye-lanthanum, i-praseodymium, njl.njl.). Kubushushu begumbi kunye noxinzelelo, i-ceria yi-oxide ezinzileyo ye-cerium. I-Cerium inokwenza i-+3 valence Ce2O3, engazinzile kwaye iya kwenza i-CeO2 ezinzileyo kunye ne-O2. I-Cerium oxide iyanyibilika kancinci emanzini, kwi-alkali nakwi-asidi. Ubuninzi yi-7.132 g/cm3, indawo yokunyibilika yi-2600℃, kwaye indawo yokubila yi-3500℃.
Indlela yokupholisha i-cerium oxide
Ubunzima bee-CeO2 particles abuphezulu. Njengoko kubonisiwe kwitheyibhile engasezantsi, ubunzima be-cerium oxide buphantsi kakhulu kunobo bedayimani kunye ne-aluminium oxide, kwaye buphantsi kunobo be-zirconium oxide kunye ne-silicon oxide, elingana ne-ferric oxide. Ngoko ke akunakwenzeka ngobuchwephesha ukuxobula izinto ezisekwe kwi-silicon oxide, ezifana neglasi ye-silicate, iglasi ye-quartz, njl.njl., kunye ne-ceria enobunzima obuphantsi ngokwembono yoomatshini kuphela. Nangona kunjalo, i-cerium oxide okwangoku yipowder yokupholisha ekhethwayo yokupholisha izinto ezisekwe kwi-silicon oxide okanye kwanezinto ze-silicon nitride. Kuyabonakala ukuba ukupholisha kwe-cerium oxide kunezinye iziphumo ngaphandle kweziphumo zoomatshini. Ubunzima bedayimani, obuyinto yokusila nokupholisha esetyenziswa rhoqo, buhlala bunezithuba zeoksijini kwi-lattice ye-CeO2, etshintsha iimpawu zayo zomzimba nezekhemikhali kwaye inempembelelo ethile kwiimpawu zokupholisha. Iipowder zokupholisha ze-cerium oxide ezisetyenziswa rhoqo ziqulethe inani elithile lezinye ii-oxides zomhlaba ezingaqhelekanga. I-Praseodymium oxide (Pr6O11) ikwanayo nesakhiwo se-cubic lattice esijonge ubuso, esifanelekileyo ukupolishwa, ngelixa ezinye ii-lanthanide rare earth oxides zingenawo amandla okupolishwa. Ngaphandle kokutshintsha isakhiwo sekristale se-CeO2, inokwenza isisombululo esiqinileyo ngayo ngaphakathi koluhlu oluthile. Kwi-high-purity nano-cerium oxide polishing powder (VK-Ce01), kokukhona ubumsulwa be-cerium oxide (VK-Ce01) buphezulu, kokukhona amandla okupolishwa aphezulu kwaye ubomi benkonzo bude, ngakumbi kwiilensi zeglasi eziqinileyo kunye ne-quartz optical ixesha elide. Xa kupolishwa nge-cyclic, kuyacetyiswa ukusebenzisa i-high-purity cerium oxide polishing powder (VK-Ce01).
Ukusetyenziswa komgubo wokupholisha we-cerium oxide:
I-Cerium oxide polishing powder (VK-Ce01), esetyenziswa kakhulu ekupolisheni iimveliso zeglasi, isetyenziswa kakhulu kwezi ndawo zilandelayo:
1. Iiglasi, ukupolisha ilensi yeglasi;
2. Ilensi yokukhanya, iglasi yokukhanya, ilensi, njl.njl.;
3. Iglasi yesikrini sefowuni ephathwayo, umphezulu wewotshi (ucango lwewotshi), njl.njl.;
4. Isikrini se-LCD zonke iintlobo zesikrini se-LCD;
5. Iirhinestones, iidayimani ezishushu (amakhadi, iidayimani kwiijini), iibhola zokukhanyisa (iitshandeli zodidi oluphezulu kwiholo enkulu);
6. Imisebenzi yezandla eyenziwe ngekristale;
7. Ukupholishwa okuncinci kwejade
Izinto ezisetyenziswa ngoku zokupholisha i-cerium oxide:
Umphezulu we-cerium oxide uxutywe ne-aluminium ukuphucula kakhulu ukupholishwa kwayo kweglasi ye-optical.
ISebe loPhando noPhuhliso lweTekhnoloji le-UrbanMines Tech. Limited, licebise ukuba ukuhlanganiswa kunye nokuguqulwa komphezulu wee-particles zokupolisha zezona ndlela ziphambili kunye neendlela zokuphucula ukusebenza kakuhle kunye nokuchaneka kokupolisha kwe-CMP. Ngenxa yokuba iipropati zee-particles zinokulungiswa ngokudityaniswa kwezinto ezininzi, kwaye uzinzo lokusasazeka kunye nokusebenza kakuhle kokupolisha kwe-slurry yokupolisha kunokuphuculwa ngokuguqulwa komphezulu. Ukulungiswa kunye nokusebenza kokupolisha kwe-CeO2 powder doped ne-TiO2 kunokuphucula ukusebenza kakuhle kokupolisha ngaphezu kwe-50%, kwaye kwangaxeshanye, iziphene zomphezulu nazo zincitshiswa nge-80%. Isiphumo sokupolisha esisebenzisanayo se-CeO2 ZrO2 kunye ne-SiO2 2CeO2 composite oxides; ngoko ke, itekhnoloji yokulungiselela i-doped ceria micro-nano composite oxides ibaluleke kakhulu kuphuhliso lwezinto ezintsha zokupolisha kunye nengxoxo yendlela yokupolisha. Ukongeza kwisixa se-doping, imeko kunye nokusasazwa kwe-dopant kwii-particles ezidityanisiweyo kuchaphazela kakhulu iipropati zazo zomphezulu kunye nokusebenza kokupolisha.
Phakathi kwazo, ukwenziwa kwee-particles zokupolisha ezinesakhiwo se-cladding kunomtsalane ngakumbi. Ke ngoko, ukukhethwa kweendlela kunye neemeko zokwenziwa kubaluleke kakhulu, ngakumbi ezo ndlela zilula kwaye zingabizi kakhulu. Ukusebenzisa i-hydrated cerium carbonate njengezinto eziphambili, ii-particles ze-aluminium-doped cerium oxide polishing zenziwe ngendlela ye-wet solid-phase mechanochemical. Phantsi kwesenzo samandla oomatshini, ii-particles ezinkulu ze-hydrated cerium carbonate zinokuqhekeka zibe zii-particles ezintle, ngelixa i-aluminium nitrate isabela namanzi e-ammonia ukwenza ii-particles ze-colloidal ezi-amorphous. Ii-particles ze-colloidal zincamatheliswa lula kwii-particles ze-cerium carbonate, kwaye emva kokomiswa kunye ne-calcination, i-aluminium doping inokufezekiswa kumphezulu we-cerium oxide. Le ndlela yasetyenziselwa ukwenza ii-particles ze-cerium oxide ezinee-doping ezahlukeneyo ze-aluminium, kwaye ukusebenza kwazo kokupolisha kwaphawulwa. Emva kokuba kongezwe isixa esifanelekileyo se-aluminium kumphezulu wee-particles ze-cerium oxide, ixabiso elibi le-surface potential liya kwanda, nto leyo eyenza umsantsa phakathi kwee-particles ze-abrasive. Kukho ukugxothwa okunamandla kwe-electrostatic, okukhuthaza ukuphuculwa kozinzo lokuxhoma okurhabaxa. Kwangaxeshanye, ukufunxwa okudibeneyo phakathi kwamasuntswana arhabaxa kunye nomaleko othambileyo otshajelwe kakuhle ngokusebenzisa umtsalane weCoulomb nako kuya komelezwa, nto leyo eluncedo ekudibaneni okudibeneyo phakathi komaleko orhabaxa kunye nomaleko othambileyo kumphezulu weglasi ekhazimlisiweyo, kwaye ikhuthaza ukuphuculwa kwesantya sokupholisha.