Ukuvula amandla ezinto ezisezingeni eliphezulu: I-Trimethylaluminium kanye ne-trimethylgallium ziqhuba ukusungula izinto ezintsha kwezimboni.
Egagasini lentuthuko esheshayo yezimboni zokukhiqiza ezisezingeni eliphezulu kanye neze-elekthronikhi zomhlaba wonke, i-trimethylaluminum (TMA, Al(CH3)3) kanye ne-trimethylgallium (TMG, Ga(CH3)3) njengezakhi zensimbi eziyinhloko eziphilayo (imithombo ye-MO) ziba yitshe lesisekelo lokusungula izinto ezintsha emikhakheni ye-catalysis, ama-semiconductor, ama-photovoltaic kanye nama-LED anezakhiwo zawo ezinhle kakhulu zamakhemikhali kanye nenani lokusetshenziswa elingenakuphikwa. Njengoba iqhubeka nokuthuthukisa amandla ayo obuchwepheshe kanye nochungechunge lokuhlinzeka oluzinzile nolusebenzayo, iShayina iba yindawo ephakeme enamasu yokuhlinzekwa kwe-trimethylaluminum kanye ne-trimethylgallium emhlabeni jikelele.
Isisekelo se-catalysis: umnikelo ovelele wei-trimethylaluminum
Kusukela ekuzalweni kobuchwepheshe be-catalytic be-Ziegler-Natta, ama-organoaluminum compounds abe yiwona mandla ayinhloko okuqhuba ukukhiqizwa kwama-polyolefin (njenge-polyethylene ne-polypropylene). Phakathi kwawo, i-methylaluminoxane (MAO), etholakala ku-trimethylaluminum emsulwa kakhulu, njenge-co-catalyst eyinhloko, isebenza ngempumelelo ama-catalyst ahlukahlukene ensimbi yokuguquguquka futhi iqhuba inqubo enkulu yomhlaba ye-polymerization. Ubumsulwa kanye nokusebenza kabusha kwe-trimethylaluminum kunquma ngqo ukusebenza kahle kohlelo lwe-catalytic kanye nekhwalithi ye-polymer yokugcina.
Izinto eziyinhloko zokukhiqiza i-semiconductor kanye ne-photovoltaic
Emkhakheni wokukhiqiza ama-chip e-semiconductor, i-trimethylaluminium iwumthombo we-aluminium obalulekile. Isebenzisa izinqubo ze-chemical vapor deposition (CVD) noma izinqubo ze-atomic layer deposition (ALD) ukuze ifake ngokunembile ukusebenza okuphezulu.i-aluminium oxide (Al2O3))amafilimu aqinile e-dielectric (high-k) aphezulu amasango e-transistor athuthukile namaseli enkumbulo. Izidingo zobumsulwa be-trimethylaluminium ziqinile kakhulu, kugxilwe kakhulu kokuqukethwe kokungcola kwensimbi, ukungcola okuqukethe umoya-mpilo, kanye nokungcola okungokwemvelo ukuqinisekisa izakhiwo zikagesi ezinhle kakhulu kanye nokuthembeka kwefilimu.
Ngesikhathi esifanayo, i-trimethylaluminum iyisandulela esithandwayo sokukhula kwama-semiconductor aqukethe i-aluminium (njenge-AlAs, i-AlN, i-AlP, i-AlSb, i-AlGaAs, i-AlGaN, i-AlInGaP, i-AlInGaN, njll.) ngobuchwepheshe be-metal organic vapor phase epitaxy (MOVPE). Lezi zinto zakha umongo wokuxhumana okusheshayo, ama-electronics anamandla, kanye namadivayisi e-optoelectronic ajulile e-ultraviolet.
Embonini ye-photovoltaic, i-trimethylaluminum nayo idlala indima ebalulekile. Ngenqubo ye-plasma-enhanced chemical vapor deposition (PECVD) noma i-ALD, i-trimethylaluminum isetshenziselwa ukwakha ungqimba lwe-aluminium oxide (Al2O3) olusezingeni eliphezulu. Lolu ngqimba lwe-passivation lunganciphisa kakhulu ukulahlekelwa kwe-recombination ebusweni bamaseli elanga e-crystalline silicon, ngaleyo ndlela kuthuthukiswe kakhulu ukusebenza kahle kokuguqulwa kwamaseli. Lungenye yezinqubo ezibalulekile ekukhiqizweni kwamaseli elanga asebenza kahle kakhulu.
Ukukhanyisa ikusasa: ama-LED nezinto ezithuthukisiwe ze-optoelectronic
Imboni ye-LED echumayo incike kakhulu ku-trimethylaluminium kanye ne-trimethylgallium. Ekukhuleni kwe-LED epitaxial (MOVPE):
* I-Trimethylaluminum iyisandulela esibalulekile sokukhulisa izendlalelo ze-epitaxial ze-III-V compound semiconductor eziqukethe i-aluminium ezifana ne-aluminium gallium nitride (AlGaN), ezisetshenziselwa ukukhiqiza ama-LED nama-laser ajulile e-ultraviolet asebenza kahle kakhulu. Iphinde isetshenziselwe ukufaka izendlalelo ze-Al2O3 noma ze-AlN passivation ukuthuthukisa ukusebenza kahle kokukhipha ukukhanya kanye nokuthembeka kwamadivayisi.
*I-Trimethylgallium (TMG)ingumthombo obaluleke kakhulu novuthiwe we-gallium enqubweni ye-MOVPE. Iyisisekelo esiyinhloko sokulungiselela izinhlobo ezahlukene ze-semiconductors eziqukethe i-gallium, okuhlanganisa:
* I-Gallium Nitride (GaN): Izinto eziyisisekelo zama-LED aluhlaza okwesibhakabhaka namhlophe, ama-laser (LDs), kanye namadivayisi kagesi anamandla amakhulu.
* I-Gallium arsenide (GaAs): Isetshenziswa kabanzi kumadivayisi kagesi asheshayo, izingxenye zemvamisa yomsakazo, amaseli elanga asebenza kahle kakhulu, kanye namadivayisi e-optoelectronic aseduze kwe-infrared.
* I-Gallium phosphide (GaP) kanye ne-gallium antimonide (GaSb): Zibalulekile emikhakheni yama-LED abomvu, aphuzi, naluhlaza, ama-photodetector, njll.
* I-Copper Indium Gallium Selenide (CIGS): izinto ezisetshenziswayo ezibamba ukukhanya okuyinhloko ezisetshenziselwa ukukhiqiza amaseli elanga asebenza kahle kakhulu.
Ubumsulwa nokuqina kwe-trimethylgallium kunquma ngqo ikhwalithi yekristalu kanye nezakhiwo zikagesi/zokukhanya zesendlalelo se-epitaxial, okugcina kuthinta ukukhanya, ukuqina kwamaza, kanye nokuphila kwe-LED. I-Trimethylgallium isetshenziselwa futhi ukulungiselela izinto ezibalulekile zefilimu encane njenge-GaAs, i-GaN, ne-GaP, ezikhonza ama-microelectronics namadivayisi anemvamisa ephezulu.
Ukuhlinzekwa kweShayina: isiqinisekiso sekhwalithi, ukuzinza, kanye nokusebenza kahle
I-China yenze intuthuko enkulu emkhakheni wamagesi akhethekile kagesi ahlanzekile kakhulu kanye nemithombo ye-MO, futhi ibonise izinzuzo ezinkulu zokuncintisana ekuhlinzekweni kwe-trimethylaluminium kanye ne-trimethylgallium:
1. Inqubo yokuhlanza esezingeni eliphezulu: Izinkampani ezihamba phambili zasekhaya ziye zaba yingcweti ekuhlikihlizweni okuqhubekayo okuqhubekayo, ukumuncwa, ukuhlanzwa kwezinga lokushisa eliphansi kanye nobunye ubuchwepheshe, futhi zingakhiqiza ngobuningi i-trimethylaluminium kanye ne-trimethylgallium emsulwa kakhulu engu-6N (99.9999%) nangaphezulu, zilawule ngokuqinile ukungcola kwensimbi (njenge-Na, K, Fe, Cu, Zn), ukungcola okuqukethe umoya-mpilo (njenge-hydrocarbons equkethe umoya-mpilo) kanye nokungcola okungokwemvelo (njenge-ethylaluminum, i-dimethylaluminum hydride), futhi zihlangabezane ngokugcwele nezidingo eziqinile zokukhula kwe-semiconductor kanye ne-LED epitaxial.
2. Ukunikezwa kwesilinganiso kanye nokuzinzile: Ukusekelwa okuphelele kweketanga lezimboni kanye nokwanda okuqhubekayo kwamandla okukhiqiza kuqinisekisa ukunikezwa okukhulu, okuzinzile, nokuthembekile kwe-trimethylaluminum kanye ne-trimethylgallium emakethe yomhlaba wonke, okumelana ngempumelelo nezingozi zeketanga lokuhlinzeka.
3. Izinzuzo zezindleko nokusebenza kahle: Ukukhiqizwa kwendawo kunciphisa kakhulu izindleko ezijwayelekile (kufaka phakathi ezokuthutha, amanani entengo, njll.) ngenkathi kunikeza ukwesekwa kwezobuchwepheshe kanye nezinsizakalo zendawo eziguquguqukayo neziphendulayo.
4. Okuqhutshwa ukusungula izinto ezintsha okuqhubekayo: Izinkampani zaseShayina ziyaqhubeka nokutshala imali ocwaningweni nasekuthuthukisweni, ziqhubeka nokwenza ngcono izinqubo zokukhiqiza ze-trimethylaluminium kanye ne-trimethylgallium, zithuthukise ikhwalithi yomkhiqizo kanye nokusebenza kohlelo lokusebenza, futhi zithuthukise ngenkuthalo imininingwane emisha yemikhiqizo ehlangabezana nezidingo zobuchwepheshe besizukulwane esilandelayo (njenge-Micro-LED, ama-node semiconductors athuthukile kakhulu, kanye namaseli elanga ahlanganisiwe asebenza kahle kakhulu).
Isiphetho
Njengezakhi zofuzo ezibonakalayo zezimboni zesimanje zobuchwepheshe obuphezulu, i-trimethylaluminum ne-trimethylgallium zidlala indima engenakuphikwa emikhakheni ye-catalytic polymerization, ama-semiconductor chips, i-photovoltaics esebenza kahle kakhulu, kanye ne-optoelectronics ethuthukisiwe (i-LED/LD). Ukukhetha i-trimethylaluminum ne-trimethylgallium eShayina akugcini nje ngokukhetha imikhiqizo yobumsulwa obuphezulu kakhulu ehlangabezana nezindinganiso eziphezulu zomhlaba, kodwa futhi nokukhetha umlingani oqavile oneziqinisekiso zamandla okukhiqiza aqinile, amakhono okusungula izinto ezintsha okuqhubekayo, kanye namakhono okuphendula isevisi asebenzayo. Yamukela i-trimethylaluminum ne-trimethylgallium ezenziwe eShayina, ngokubambisana kunika amandla ukuthuthukiswa kwezimboni, futhi uqhube umngcele wezobuchwepheshe besikhathi esizayo!