Te wetewete i te mana o ngā rauemi hou: Mā te Trimethylaluminum me te trimethylgallium e akiaki te auahatanga ahumahi.
I roto i te ngaru o te whanaketanga tere o ngā ahumahi hanga me ngā ahumahi hiko o te ao, ko te trimethylaluminum (TMA, Al(CH 3 ) 3 ) me te trimethylgallium (TMG, Ga(CH 3 ) 3 ) hei matū matū waro matua (ngā puna MO) kei te noho hei poutokomanawa o te auahatanga i roto i ngā mara o te whakaterenga, ngā haurua-ira, ngā photovoltaics me ngā LED me ō rātou āhuatanga matū pai me te uara tono kore e taea te whakakapi. Me tōna kaha hangarau e whakapai tonu ana me te mekameka tuku pumau me te whai hua, kei te noho a Haina hei whenua rautaki mō te tuku o te trimethylaluminum me te trimethylgallium o te ao.
Ko te tūāpapa o te whakaterenga: te takoha nui atrimethylaluminium
Mai i te whānautanga o te hangarau whakaterenga Ziegler-Natta, kua noho ngā matū organoaluminium hei tino kaha mō te hanga o ngā polyolefins (pērā i te polyethylene me te polypropylene). I roto i ēnei, ko te methylaluminoxane (MAO), i ahu mai i te trimethylaluminum tino parakore, hei kaiwhakaoho matua, ka whakahohe pai i ngā whakaoho konganuku whakawhiti me te akiaki i te tukanga polymerization nui o te ao. Ko te parakore me te tauhohenga o te trimethylaluminum ka whakatau tika i te whai huatanga o te pūnaha whakaterenga me te kounga o te polymer whakamutunga.
Ngā matū matua mō te hanga haurua-ira me te hanga photovoltaic
I roto i te mara o te hanga maramara haurua-haurua, he puna konumohe tino nui te trimethylaluminum. Ka whakamahia e ia ngā tukanga whakatakoto matū (CVD) me te whakatakoto paparanga ngota (ALD) hei whakatakoto tika i te mahi teitei.waikura konumohe (Al2O3))ngā kiriata pūmau dielectric teitei (k-teitei) mō ngā kēti transistor matatau me ngā pūtau mahara. He tino pakari ngā whakaritenga parakore mō te trimethylaluminum, me te aro nui ki te ihirangi o ngā poke whakarewa, ngā poke kei roto te hāora, me ngā poke rauropi hei whakarite i ngā āhuatanga hiko pai rawa atu me te pono o te kiriata.
I taua wā anō, ko te trimethylaluminum te matū pai rawa atu mō te tipu o ngā haurua-whakawhitiwhiti matū kei roto he konumohe (pērā i te AlAs, AlN, AlP, AlSb, AlGaAs, AlGaN, AlInGaP, AlInGaN, me ētahi atu) mā te hangarau epitaxy wāhanga kohu matū whakarewa (MOVPE). Ko ēnei rauemi te pūtake o ngā whakawhitiwhiti tere-tere, ngā hikohiko mana, me ngā taputapu optoelectronic ultraviolet hohonu.
I roto i te umanga photovoltaic, he mahi nui anō tā te trimethylaluminum. Mā te tukanga plasma-enhanced chemical vapor deposition (PECVD) ALD rānei, ka whakamahia te trimethylaluminum hei hanga i tētahi paparanga passivation konumohe waikura kounga teitei (Al2O3). Ka taea e tēnei paparanga passivation te whakaiti nui i te ngaronga o te recombination i runga i te mata o ngā pūtau solar silicon crystalline, ā, ka tino whakapai ake i te pai o te huringa o ngā pūtau. Ko tētahi o ngā tukanga matua i roto i te hanga o ngā pūtau solar tino pai.
Te whakamārama i te heke mai: Ngā LED me ngā rauemi optoelectronic matatau
He nui te whakawhirinaki o te umanga LED e puāwai ana ki te trimethylaluminum me te trimethylgallium. I roto i te tipu epitaxial LED (MOVPE):
* Ko te Trimethylaluminum tētahi matū matua mō te whakatipu i ngā paparanga epitaxial semiconductor matū III-V kei roto konumohe pērā i te konumohe gallium nitride (AlGaN), e whakamahia ana hei hanga i ngā LED ultraviolet hohonu me ngā laser mahi teitei. Ka whakamahia hoki hei whakatakoto i ngā paparanga passivation Al2O3, AlN rānei hei whakapai ake i te whai huatanga me te pono o te tango māramatanga o ngā taputapu.
*Trimethylgallium (TMG)Koia te pūtake tino nui, tino pakari hoki o te gallium i roto i te tukanga MOVPE. Koinei te matū matua mō te whakarite i ngā momo haurua matū kei roto he gallium, tae atu ki:
* Nitride Kariuma (GaN): He rauemi tūāpapa mō ngā rama LED kikorangi me te mā, ngā taiaho (LD), me ngā taputapu hiko kaha-tiketike.
* Gallium arsenide (GaAs): E whakamahia whānuitia ana i roto i ngā taputapu hiko tere-teitei, ngā wāhanga auau reo irirangi, ngā pūtau hiko hiko ātea tino whai hua, me ngā taputapu hiko opto-whero tata.
* Te Gallium phosphide (GaP) me te gallium antimonide (GaSb): He mea nui ēnei i roto i ngā mara o ngā rama LED whero, kōwhai, me te kakariki, ngā taputapu whakaahua, me ētahi atu.
* Te Parahi Indium Gallium Selenide (CIGS): he rauemi matua mō te paparanga mimiti mārama e whakamahia ana hei hanga i ngā pūtau hiko angiangi tino whai hua.
Ko te parakore me te pumau o te trimethylgallium te mea e whakatau tika ana i te kounga tioata me ngā āhuatanga hiko/whatu o te paparanga epitaxial, ā, ko te mutunga iho ka pā ki te kanapa, te ōritetanga o te roanga ngaru, me te roa o te ora o te LED. Ka whakamahia hoki te Trimethylgallium ki te whakarite i ngā rauemi kiriata angiangi matua pēnei i te GaAs, GaN, me te GaP, hei mahi mā ngā taputapu hiko iti me ngā taputapu auau-teitei.
Te tuku mai i Haina: te taurangi o te kounga, te pumau, me te whai huatanga
Kua tino ahu whakamua a Haina i roto i te mara o ngā hau motuhake hiko parakore-teitei me ngā pūtake MO, ā, kua whakaatuhia hoki he painga whakataetae kaha i roto i te tuku o te trimethylaluminum me te trimethylgallium:
1. Tukanga purenga matatau: Kua mōhio ngā kamupene matua o te motu ki te whakatō tonu, te mimiti, te purenga pāmahana iti me ētahi atu hangarau matatau, ā, ka taea te whakaputa papatipu i te trimethylaluminum me te trimethylgallium tino parakore o te 6N (99.9999%) me runga ake, me te whakahaere tika i ngā poke whakarewa (pēnei i te Na, K, Fe, Cu, Zn), ngā poke kei roto te hāora (pēnei i ngā hauwaiwaro kei roto te hāora) me ngā poke waro (pēnei i te ethylaluminum, dimethylaluminum hydride), me te whakatutuki katoa i ngā whakaritenga pakari o te tipu epitaxial semiconductor me te LED.
2. Te tauine me te pumau o te tuku: Mā te tautoko katoa o te mekameka ahumahi me te kaha whakaputa e whakawhānui tonu ana ka whakarite kia nui, kia pumau, kia pono hoki te tuku o te trimethylaluminum me te trimethylgallium ki te mākete o te ao, ā, ka ārai pai i ngā mōrearea o te mekameka tuku.
3. Ngā painga utu me te whai huatanga: Ka tino whakaitihia ngā utu katoa (tae atu ki ngā mahi kawe, ngā taake, me ētahi atu) mā te whakaputa ā-rohe, me te whakarato hoki i te tautoko hangarau me ngā ratonga ā-rohe e ngāwari ake ana, e tere ake ana hoki.
4. Te auahatanga tonu: Kei te haere tonu ngā kamupene Haina ki te haumi ki te rangahau me te whanaketanga, te arotau tonu i ngā tukanga whakaputa o te trimethylaluminum me te trimethylgallium, te whakapai ake i te kounga hua me te mahi tono, me te whakawhanake kaha i ngā whakatakotoranga hou o ngā hua e tutuki ai ngā hiahia o ngā hangarau o te whakatupuranga e whai ake nei (pēnei i te Micro-LED, ngā semiconductors pūnga matatau ake, me ngā pūtau rā whakarārangi-teitei).
Whakamutunga
Hei "ira rauemi" o ngā ahumahi hangarau hou, he tūranga nui tā te trimethylaluminum me te trimethylgallium i roto i ngā mara o te polymerization catalytic, ngā maramara semiconductor, ngā photovoltaics tino whai hua, me ngā optoelectronics matatau (LED/LD). Ko te whiriwhiri i te trimethylaluminum me te trimethylgallium mai i Haina ehara i te mea ko te whiriwhiri noa i ngā hua tino parakore e tutuki ana i ngā paerewa o te ao, engari ko te whiriwhiri hoki i tētahi hoa rautaki me ngā taurangi kaha whakaputa kaha, ngā kaha auaha tonu, me ngā kaha urupare ratonga whai hua. Awhihia te trimethylaluminum me te trimethylgallium i hangaia ki Haina, whakamanahia ngātahi te whakapai ake ahumahi, me te akiaki i te rohe hangarau ā-mua!