Imepe ike nke ihe ndị dị ọhụrụ: Trimethylaluminum na trimethylgallium na-akwalite mmepụta ihe ọhụrụ n'ime ụlọ ọrụ mmepụta ihe.
N'ọganihu ngwa ngwa nke mmepụta ihe na ụlọ ọrụ eletrọniki dị elu n'ụwa niile, trimethylaluminum (TMA, Al(CH3) 3) na trimethylgallium (TMG, Ga(CH3) 3) dịka ihe ndị mejupụtara ígwè dị n'ime (isi iyi MO) na-aghọ isi ihe ọhụrụ n'ọhịa nke catalysis, semiconductors, photovoltaics na LEDs nwere ihe onwunwe kemịkalụ dị mma na uru ngwa a na-apụghị ịgbanwe agbanwe. Site na mmụba ike teknụzụ ya na usoro ọkọnọ kwụsiri ike ma dị irè, China na-aghọ ebe dị elu maka inye trimethylaluminum na trimethylgallium zuru ụwa ọnụ.
Isi ihe dị mkpa nke catalysis: onyinye pụrụ iche nketrimethylaluminum
Kemgbe a mụrụ teknụzụ Ziegler-Natta catalytic, ihe ndị mejupụtara organoaluminum aghọwo isi ihe na-akpali mmepụta nke polyolefins (dịka polyethylene na polypropylene). N'ime ha, methylaluminoxane (MAO), nke sitere na trimethylaluminum dị ọcha, dị ka ihe na-akpali akpali dị mkpa, na-eme ka ọtụtụ ihe na-akpali mgbanwe metal dị iche iche rụọ ọrụ nke ọma ma na-akwalite nnukwu usoro polymerization nke ụwa. Ịdị ọcha na mmeghachi omume nke trimethylaluminum na-ekpebi ozugbo arụmọrụ nke sistemụ catalytic na ịdị mma nke polymer ikpeazụ.
Isi ihe dị mkpa maka imepụta semiconductor na photovoltaic
N'ihe gbasara imepụta chip semiconductor, trimethylaluminum bụ isi iyi aluminom dị mkpa. Ọ na-eji usoro chemical vapor deposition (CVD) ma ọ bụ usoro atomic layer deposition (ALD) iji chekwaa arụmọrụ dị elu.aluminom oxide (Al2O3))ihe nkiri dielectric dị elu (high-k) maka ọnụ ụzọ transistor dị elu na mkpụrụ ndụ ebe nchekwa. Ihe achọrọ maka ịdị ọcha maka trimethylaluminum siri ike nke ukwuu, a na-elebara anya nke ọma na ọdịnaya nke ihe adịghị ọcha ígwè, ihe adịghị ọcha nwere oxygen, na ihe adịghị ọcha organic iji hụ na ihe ngosi eletriki dị mma na ntụkwasị obi nke ihe nkiri ahụ.
N'otu oge ahụ, trimethylaluminum bụ ihe kacha mma maka uto nke semiconductors nwere aluminom (dịka AlAs, AlN, AlP, AlSb, AlGaAs, AlGaN, AlInGaP, AlInGaN, wdg) site na teknụzụ metal organic vapor phase epitaxy (MOVPE). Ihe ndị a bụ isi ihe dị mkpa nke nkwukọrịta ọsọ ọsọ, eletrọniki ike, na ngwaọrụ optoelectronic ultraviolet miri emi.
N'ime ụlọ ọrụ fotovoltaic, trimethylaluminum na-arụkwa ọrụ dị mkpa. Site na usoro nchekwa anwụrụ ọkụ kemịkalụ emelitere na plasma (PECVD) ma ọ bụ ALD, a na-eji trimethylaluminum emepụta akwa passivation aluminum oxide dị elu (Al2O3). Akwa passivation a nwere ike ibelata mfu recombination n'elu mkpụrụ ndụ anyanwụ silicon kristal, si otú a na-eme ka arụmọrụ mgbanwe nke mkpụrụ ndụ dịkwuo mma. Ọ bụ otu n'ime usoro dị mkpa n'imepụta mkpụrụ ndụ anyanwụ dị elu.
Ịkụnye ọkụ n'ọdịnihu: LEDs na ihe optoelectronic dị elu
Ụlọ ọrụ LED na-eto eto dabere nke ukwuu na trimethylaluminum na trimethylgallium. Na uto epitaxial LED (MOVPE):
* Trimethylaluminum bụ isi ihe na-ebute ụzọ maka ịkọpụta akwa epitaxial semiconductor nke nwere aluminom nke gụnyere III-V dịka aluminum gallium nitride (AlGaN), nke a na-eji emepụta LED na lasers miri emi nke nwere ultraviolet dị elu. A na-ejikwa ya etinye akwa passivation Al2O3 ma ọ bụ AlN iji melite arụmọrụ mwepụta ìhè na ntụkwasị obi nke ngwaọrụ.
*Trimethylgallium (TMG)bụ isi iyi kachasị mkpa na nke tozuru okè nke gallium na usoro MOVPE. Ọ bụ isi ihe na-ebute ụzọ maka ịkwadebe ụdị semiconductor dị iche iche nwere gallium, gụnyere:
* Gallium Nitride (GaN): Ihe e ji arụ ọrụ maka LED ndị na-acha anụnụ anụnụ na ọcha, laser (LD), na ngwaọrụ eletrọniki dị ike.
* Gallium arsenide (GaAs): A na-eji ya eme ihe n'ọtụtụ ebe na ngwaọrụ eletrọniki dị elu, ihe ndị mejupụtara redio ugboro ugboro, sel anyanwụ dị elu, na ngwaọrụ optoelectronic dị nso na infrared.
* Gallium phosphide (GaP) na gallium antimonide (GaSb): Ha dị oke mkpa n'ọhịa LEDs uhie, odo, na akwụkwọ ndụ akwụkwọ ndụ, fotodetectors, wdg.
* Copper Indium Gallium Selenide (CIGS): ihe mkpuchi isi nke na-amịkọrọ ìhè nke e ji emepụta mkpụrụ ndụ anyanwụ dị gịrịgịrị nke nwere ihe mkpuchi anyanwụ dị elu.
Ịdị ọcha na nkwụsi ike nke trimethylgallium na-ekpebi kpọmkwem ịdị mma kristal na ihe onwunwe eletriki/anya nke oyi akwa epitaxial, nke na-emetụta nchapụta, nguzosi ike ogologo ebili mmiri, na ndụ nke LED. A na-ejikwa Trimethylgallium akwadebe ihe nkiri dị mkpa dị ka GaAs, GaN, na GaP, na-ejere microelectronics na ngwaọrụ ugboro ugboro dị elu ozi.
Ọnye China: nkwa nke ịdị mma, nkwụsi ike, na arụmọrụ
China enweela ọganihu dị ukwuu n'ọhịa nke gas pụrụ iche eletrọniki dị ọcha na isi mmalite MO, ma egosipụtala uru asọmpi siri ike na ọkọnọ trimethylaluminum na trimethylgallium:
1. Usoro nhicha dị oke mma: Ụlọ ọrụ ndị isi n'ime obodo emeela nke ọma n'ịmepụta ihe na-eme ka ihe dị ọcha, ịmịnye ihe, nhicha dị obere na teknụzụ ndị ọzọ, ha nwekwara ike ịmepụta trimethylaluminum na trimethylgallium nke 6N (99.9999%) na karịa nke ọma, na-achịkwa ihe ndị na-adịghị ọcha nke ígwè (dịka Na, K, Fe, Cu, Zn), ihe ndị na-adịghị ọcha nke nwere oxygen (dịka hydrocarbons nwere oxygen) na ihe ndị na-adịghị ọcha nke organic (dịka ethylaluminum, dimethylaluminum hydride), ma mezuo ihe achọrọ nke semiconductor na uto epitaxial LED.
2. Ọnụọgụ na nnyefe kwụsiri ike: Nkwado zuru oke nke usoro mmepụta na ịbawanye ikike mmepụta na-eme ka nnukwu, kwụsie ike, na ntụkwasị obi nke trimethylaluminum na trimethylgallium dị n'ahịa ụwa, na-eguzogide ihe egwu nke usoro nnyefe ngwa ahịa nke ọma.
3. Uru ọnụ ahịa na arụmọrụ: Mmepụta mpaghara na-ebelata ọnụ ahịa zuru oke (gụnyere njem, ụtụ isi, wdg) ebe ọ na-enye nkwado teknụzụ na ọrụ mpaghara na-agbanwe agbanwe ma na-aza ajụjụ.
4. N'ịga n'ihu na-akwalite ihe ọhụrụ: Ụlọ ọrụ ndị China na-aga n'ihu na-etinye ego na nyocha na mmepe, na-emeziwanye usoro mmepụta nke trimethylaluminum na trimethylgallium, na-emeziwanye mma ngwaahịa na arụmọrụ ngwa, ma na-emepụta nkọwapụta ọhụrụ nke ngwaahịa ndị na-emezu mkpa nke teknụzụ ọgbọ na-abịa (dịka Micro-LED, semiconductors node dị elu, na mkpụrụ ndụ anyanwụ dị elu).
Mmechi
Dịka "mkpụrụ ndụ ihe nketa" nke ụlọ ọrụ teknụzụ dị elu nke oge a, trimethylaluminum na trimethylgallium na-arụ ọrụ a na-apụghị ịgbanwe agbanwe n'ọhịa nke catalytic polymerization, semiconductor chips, photovoltaics dị elu, na optoelectronics dị elu (LED/LD). Ịhọrọ trimethylaluminum na trimethylgallium site na China abụghị naanị ịhọrọ ngwaahịa dị ọcha dị elu nke na-emezu ụkpụrụ kachasị elu nke ụwa, kamakwa ịhọrọ onye mmekọ atụmatụ nwere nkwa ike mmepụta siri ike, ikike imepụta ihe na-aga n'ihu, na ikike nzaghachi ọrụ dị irè. Nabata trimethylaluminum na trimethylgallium emere na China, jikọọ aka mee ka nkwalite ụlọ ọrụ dịkwuo ike, ma kwalite ókèala teknụzụ n'ọdịnihu!